Laser Applications in Microelectronic and Optoelectronic Manufacturing
The chemical composition of these TiC films was established by X-ray photoelectron spectroscopy (XPS). ... A C/Ti ratio of 0.9, after sputtering, is consistent with the formation of typically sub-stoichiometric TiC2 with some preferential ... There are excellent correlations between the observed d-spacings of TiC on 52100 and 440 C, and the reference values from the powder diffraction file (PDF) of TiC.
| Title | : | Laser Applications in Microelectronic and Optoelectronic Manufacturing |
| Author | : | |
| Publisher | : | Society of Photo Optical - 1999 |
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