.Mitsubishi Electric Tadashi Nishimura, Yoichi Akasaka LSI Research 5 Development Lab., Mitsubishi Electric In recent years, ... Figure 1 is the schematic diagram of this equipment. A CW argon laser beam with output power of 20 W is irradiated perpendicularly onto a wafer through 20 mm thick quartz window. Personalanbsp;...
Title | : | Extended Abstracts of the ... Conference on Solid State Devices and Materials |
Author | : | |
Publisher | : | - 1984 |
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